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Spin Coater or Developer 6-12 inches |
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Product Overview
Professional spin coater with housing of SUS 304 stainless steel or solid polypropylene housing and frame of Aluminum-Extrusion frames or SUS 304 square steel.
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Spin Coater or Developer 6-12 inch
Spin Coater or Developer
6-12 inches
Product View |
- Coater dimension: LxDxH = the actual product design
- Equipment housing: SUS 304 stainless steel or solid polypropylene housing
- Equipment frame: Aluminum-Extrusion frames or SUS 304 square steel
- Operation viewing: Viewing window made of transparent PVC or glass
- Wiring: Back- and bottom- hidden wiring
- Ventilation: Indirect Ventilation System
- Coater Stand: Height adjustable stand with position lock feature
- Lid: Air-valve driven with open/close alert design
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| Application | 8 inch or 12 inch Wafer / Glass |
| Specialty | Build-to-order available |
| Operation Procedure |
Open lid > manual substrate placement > manual position adjustment > vacuuming > substrate attached to rotary plate > close lid > chemical release > power on > low speed > medium speed > high speed > power off > un-vacuuming > open lid > manual product retrieval |
| Coater Unit
Electrical Controlling System
Mechanical Module
Rotary Parts
Wafer Automatic Feeder
Robotic Arms
Pipeline Unit
Safety Gadgets
Accessories Fixture
Option
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