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Multi-Slot Spin Coater
Spin Coater 2"-6" Spin Coater or Developer 6"-12" Multi-Spin Coater Spin Cleaner Spin Dryer Wet Bench Die Flipper Wafer Expander Chuck Shell Off Machine Ring Maker Wafer Waxer Wafer Mounter
Multi-Slot Spin Coater
Product Overview
This professional multi-slot spin coater best fits for 2"-6" waffer, 6" solar cell (wafer), and other semiconductor-related substrates.
Multi-Slot Spin Coater
Application
  • 2" - 6" Wafer
  • 6" solar cell(wafer)
  • Other semiconductor-related substrates
Operation Mode Semi-Auto/ Manual
Product type Station-size: 2-, 3-, 4- systems
(PS.Different Model)
Multi-Slot Spin Coater
Product:

Station-sized Multi-spin coater

Housing:

SUS or PP casing.

Operator Space:

SUS 304 stainless steel / solid polypropylene housing

Frame:

Aluminum-Extrusion frames/SUS 304 square steel.

Lid:

Made of polypropylene. Dimension: 300mm in diameter/150mm in height. Indirect vacuuming design

Coating Size:

2 inch - 4 inch Wafer

Coater Stand:

Wheels with anchor and height adjustment

Wiring:

Back- and Bottom- Hidden

Sash:

Transparent PVC sash with full-length vertical adjustment; effective protection from inhalation of hazardous vapors such as acidic gas

Ventilation:

Back-end ventilation system with upward-airway piping (8-inches pipe width x 1 Damper).

Lighting:

Top 20W florescent light within equipment

Rotary Scheme:

Japan SANYO DENKI or MITSUBISHI AC Servo Motor with Indirect Lever Design.

RPM setting:

3 to 7 level of speed according to customer's need

setup:

Digital input.

input:

Chinese human-machine interface with color screen for direct input

Operating System:

PLC/PC Base/PAC.

Memory Preset:

10 memory settings according to customer's needs

Emergency Shut-Off:

Yes (E.M.O switch)

Power:

3 x 220V 20A

Operation parameter:

Openly modifiable

Vacuum Sensor:

Vacuum SENSOR.

Safety Feature:

Leakage Circuit Breaker and emergency stop button

Panel:

On/Off Vacuum Button

Options:
  1. Center Positioning Control
  2. Wafer Automatic Feeder
  3. Wafer Cleaner
  4. Robotic Arm
  5. Weight Transducer
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Copyright © 2008 Swift Rich Technology
Address : (10487) 4F., No.101, Sec. 3, Nanjing E. Rd., Zhongshan District, Taipei City 104, Taiwan (R.O.C.)
Tel : +886-2-5582-2892 / FAX : +886-2-5582-2894 /Mobile Phone : +886-915-072-563
24Hr Service Hotline: +886-915-072-563

SRT specializes in Spin Coater,Wet Bench,Spin Cleaner,Spin Dryer,Ring Maker,Die Flipper,Wafer Expander,Chuck,Wafer Mounter.

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